——MBE System———————————————————————
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Riber 21 MBE System
• 3" substrate
• In-situ characterizaion
• RHEED for monitoring surface conditions and growth rates
• 5 effusion cells ( Ga, As, Al, Si, Be)
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Ircon Modline 3v Pyrometer
• Temperature Range : 400 ~ 1,200 °C
• Wavelength : 0.91 ~ 0.97 µm
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V——Electroluminescence System———————————————
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Vertex 70 FTIR System
• Spectral Range : 10,000 ~ 30 cm
• Resolution : 0.16 cm
• BeamSplitter : KBr, Si on CaF, Si
• Detector : Si Bolometer, MCT, MIR DLATGS, FIR DLATGS
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Signal Recovery 7265 DSP Lock-in Amplifier
• Frequency Range : 0.001 to 250 kHz
• Current and Voltage sensitivity : 2 nV max. sen
• Dual reference, Dual harmonics
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Janis Cryostat
• Temperature : K
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