FACILITIES

 
 

FACILITIES

MEMS Lab - Bonner 317

  • Hot plate
  • High Frequency Induction Heating System
  • Automated UV Lithography
  • Vacuum Oven
  • Wet Bench

NANO Lab - Bonner 318

  • Fume Hood
  • Anodized Aluminum Setup
  • Syringe Pump
  • Electrospinning Setup
  • Spin Coater
  • Convection Oven

E-beam Lab - Bonner 118

  • Nano lithography:
  • JEOL JSM6500F Electron Beam Microscope
  • Nabity NPGS E-Beam Writing System
  • CEE Model 100 Spin Coater
  • Bake Oven
  • K&S Model 4500 Series Wire Bonder

RF test facility - Bonner 212

  • Vector network analyzer (HP 8510C)
  • RF Signal generator (HP 83621A)
  • S-parameter test set (HP 8514B)
  • Wattmeter
  • Spectrum analyzer
  • RF probe station (Jr 2745)

aCleanroon - Bonner 208

  • Reactive ion etcher
  • Mask aligner
  • Thermal evaporator
  • Wet station
  • Tube furnace
  • Ovens
  • Spin coater
  • DC sputtering system
  • Plasma-Assisted Chemical Vapor Deposition
  • Reactive ion etcher
  • E-beam evaporator
  • Deionized water system
  • Optical microscope
  • UV ozone cleaning system
  • Various meter