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FACILITIES
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FACILITIES
MEMS Lab - Bonner 317
- Hot plate
- High Frequency Induction Heating System
- Automated UV Lithography
- Vacuum Oven
- Wet Bench
NANO Lab - Bonner 318
- Fume Hood
- Anodized Aluminum Setup
- Syringe Pump
- Electrospinning Setup
- Spin Coater
- Convection Oven
E-beam Lab - Bonner 118
- Nano lithography:
- JEOL JSM6500F Electron Beam Microscope
- Nabity NPGS E-Beam Writing System
- CEE Model 100 Spin Coater
- Bake Oven
- K&S Model 4500 Series Wire Bonder
RF test facility - Bonner 212
- Vector network analyzer (HP 8510C)
- RF Signal generator (HP 83621A)
- S-parameter test set (HP 8514B)
- Wattmeter
- Spectrum analyzer
- RF probe station (Jr 2745)
Cleanroon - Bonner 208
- Reactive ion etcher
- Mask aligner
- Thermal evaporator
- Wet station
- Tube furnace
- Ovens
- Spin coater
- DC sputtering system
- Plasma-Assisted Chemical Vapor Deposition
- Reactive ion etcher
- E-beam evaporator
- Deionized water system
- Optical microscope
- UV ozone cleaning system
- Various meter
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