EE 403/503 Introduction to Plasma Processing

Spring 2013

 

The following examples should be studied for the tests:

 

 

Test I

Subject

Examples

Basic Atomic Theory

E1

Particle Collisions

E2

The Kinetic Theory of Gases

E3

Boltzmann Distribution

E4

Radiation & Equilibrium

-

Characteristics of Plasmas

E5

Equation Sheet I,  Equation Sheet II & Data Sheet

Sample

 

 

Test II

Subject

Examples

Electrodes

Q1

 DC Discharges

Q2

 High Frequency Discharges

Q3

Data Sheet I & Data Sheet II