MEMS for biochemical sensing and communication


Dr. Long Que

Center for Wireless Integrated Microsystems

Department of Electrical Engineering and Computer Science University of Michigan at Ann Arbor


MEMS (Microelectromechanical Systems) technology has been proved an enabling technology for many applications in different disciplines. Recently, its research comes to an even more challenging level: wireless integrated microsystems (WIMS) level, which basically promises to integrate sensing, actuation elements and wireless interface circuits on a single chip, thereby forming a compact smart system with super performance. In this talk, I will talk about my research work in the two key areas for the futuristic WIMS (1) MEMS for biochemical sensing and imaging:  A MEMS device, the first demonstration of this kind, for indirect and direct biochemical (DNA and protein) fluorescence imaging and detection utilizing a self-contained battery-operated on-chip, wavelength-tunable microfluidic optical source will be presented. Basic science and engineering issues, technical challenges and experimental results will be presented and discussed in detail. (2) MEMS for

communication: Firstly, the first fully integrated bi-stable, zero standby power and milliNewton contact force RF switch for wireless communication will be presented. At current stage, at 3.5GHz it offers 1dB insertion loss and 30dB isolation with sub 1ms switching speed. RF power up to 1 W can be handled without any degradation. Secondly, a latching optical MEMS-based optical variable attenuator (VOA) for optical communication systems will be presented. The VOA is the first ever MEMS-based product with digital or analog latching mechanisms in the research community and industry. It has wide dynamic range up to -50dB and fine attenuation resolution down to sub 0.1dB as well as a fast speed of 0.8-1.5ms.